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  • Session 1: Plenary I: 5G Technologies
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    15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS

    • Xuan Sang Nguyen, Singapore-MIT Alliance for Research and Technology ;
    • Sachin Yadav, National University of Singapore ;
    • Kwang Hong Lee, Singapore-MIT Alliance for Research and Technology ;
    • David Kohen, ASM Belgium ;
    • Annie Kumar, National University of Singapore ;
    • R. I. Made, Singapore-MIT Alliance for Research and Technology ;
    • Xiao Gong, National University of Singapore ;
    • Kenneth Eng Kian Lee, Singapore-MIT Alliance for Research and Technology ;
    • Chuan Seng Tan, Nanyang Technological University ;
    • Soon Fatt Yoon, Nanyang Technological University ;
    • Eugene Fitzgerald, Massachusetts Institute of Technology ;
    • Soo Jin Chua, National University of Singapore
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    Use this link to view the PDF file: 15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS

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