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Session 1: Plenary I: 5G Technologies
15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS
- Xuan Sang Nguyen, Singapore-MIT Alliance for Research and Technology ;
- Sachin Yadav, National University of Singapore ;
- Kwang Hong Lee, Singapore-MIT Alliance for Research and Technology ;
- David Kohen, ASM Belgium ;
- Annie Kumar, National University of Singapore ;
- R. I. Made, Singapore-MIT Alliance for Research and Technology ;
- Xiao Gong, National University of Singapore ;
- Kenneth Eng Kian Lee, Singapore-MIT Alliance for Research and Technology ;
- Chuan Seng Tan, Nanyang Technological University ;
- Soon Fatt Yoon, Nanyang Technological University ;
- Eugene Fitzgerald, Massachusetts Institute of Technology ;
- Soo Jin Chua, National University of Singapore
Use this link to view the PDF file: 15.3 Growth of InGaAs-Channel Transistor Layers on Large-Scale Si Wafers for Hetero-Integration with Si CMOS